APA (7th ed.) Citation
Einspruch, N. G., & Brown, D. M. (1983). VLSI Electronics Microstructure science: Vol.8. Plasma proceesing for VLSI. Academic Press.
Chicago Style (17th ed.) Citation
Einspruch, Norman G., and Dale M. Brown. VLSI Electronics Microstructure Science: Vol.8. Plasma Proceesing for VLSI. Orlando: Academic Press, 1983.
MLA (9th ed.) Citation
Einspruch, Norman G., and Dale M. Brown. VLSI Electronics Microstructure Science: Vol.8. Plasma Proceesing for VLSI. Academic Press, 1983.
Warning: These citations may not always be 100% accurate.