Doering, R., & Nishi, Y. (2008). Handbook of Semiconductor Manufacturing Technology (2.ed.). CRC Press.
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Chicago Style (17th ed.) Citation
Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2.ed. Boca Raton: CRC Press, 2008.
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MLA (9th ed.) Citation
Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2.ed. CRC Press, 2008.
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Warning: These citations may not always be 100% accurate.