APA (7th ed.) Citation
Runyan, W., & Bean, K. (1990). Semiconductor integrated circuit processing technology. Addison-Wesley.
Chicago Style (17th ed.) Citation
Runyan, W.R, and K.E Bean. Semiconductor Integrated Circuit Processing Technology. Reading: Addison-Wesley, 1990.
MLA (9th ed.) Citation
Runyan, W.R, and K.E Bean. Semiconductor Integrated Circuit Processing Technology. Addison-Wesley, 1990.
Warning: These citations may not always be 100% accurate.