Rai-Choudhury, P. (1997). Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 2. SPIE - The International Society for Optical Engineering.
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Chicago Style (17th ed.) Citation
Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 2. Bellingham: SPIE - The International Society for Optical Engineering, 1997.
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MLA (9th ed.) Citation
Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 2. SPIE - The International Society for Optical Engineering, 1997.
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Warning: These citations may not always be 100% accurate.