APA (7th ed.) Citation
Moreau, W. (1988). Semiconductor lithography. Principles practices and materials. Plenum Press.
Chicago Style (17th ed.) Citation
Moreau, W.M. Semiconductor Lithography. Principles Practices and Materials. New York: Plenum Press, 1988.
MLA (9th ed.) Citation
Moreau, W.M. Semiconductor Lithography. Principles Practices and Materials. Plenum Press, 1988.
Warning: These citations may not always be 100% accurate.