APA (7th ed.) Citation
(2001). Journal of vacuum science and technology. Part A. Vacuum, surfaces and films.
Chicago Style (17th ed.) Citation
Journal of Vacuum Science and Technology. Part A. Vacuum, Surfaces and Films. 2001.
MLA (9th ed.) Citation
Journal of Vacuum Science and Technology. Part A. Vacuum, Surfaces and Films. 2001.
Warning: These citations may not always be 100% accurate.