Rossnagel, S. M. (1989). Handbook of plasma processing technology: Fundamentals, etching, deposition and surface interactions (1.vyd.). Noyes Publications.
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Chicago Style (17th ed.) Citation
Rossnagel, Stephen M. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions. 1.vyd. Park Ridge: Noyes Publications, 1989.
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MLA (9th ed.) Citation
Rossnagel, Stephen M. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions. 1.vyd. Noyes Publications, 1989.
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Warning: These citations may not always be 100% accurate.