American Chemical Society. Division of Industrial and Engineering Chemistry & Casper, L. A. (1986). Microelectronics processing: Inorganic materials characterization. American Chemical Society.
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Chicago Style (17th ed.) Citation
American Chemical Society. Division of Industrial and Engineering Chemistry and L. A. Casper. Microelectronics Processing: Inorganic Materials Characterization. Washington, DC: American Chemical Society, 1986.
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MLA (9th ed.) Citation
American Chemical Society. Division of Industrial and Engineering Chemistry and L. A. Casper. Microelectronics Processing: Inorganic Materials Characterization. American Chemical Society, 1986.
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Warning: These citations may not always be 100% accurate.