Microelectronics processing : inorganic materials characterization /

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Bibliographic Details
Corporate Author:	American Chemical Society. Division of Industrial and Engineering Chemistry
Other Authors:	Casper, L. A.
Format:	Book
Language:	English
Published:	Washington, DC American Chemical Society 1986.
Series:	ACS symposium series 295
Subjects:	Microelectronics > Materials > Congresses.
Online Access:	View in OPAC
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Holdings details from Slovenská chemická knižnica (I)
Call Number:	schkA2005/98353
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