Introduction to microlithography /

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Bibliographic Details
Other Authors:	Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Bowden, M. J., 1943-
Format:	Book
Language:	English
Published:	Washington, DC American Chemical Society 1994.
Edition:	2nd ed.
Series:	ACS professional reference book
Subjects:	Microlithography > Congresses. Photoresists > Congresses. Plasma etching > Congresses. Semiconductors > Etching > Congresses.
Online Access:	View in OPAC
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Holdings details from Slovenská chemická knižnica (I)
Call Number:	schkA2005/98570
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