APA (7th ed.) Citation
Thompson, L. F., Willson, C. G., & Bowden, M. J. (1994). Introduction to microlithography (2nd ed.). American Chemical Society.
Chicago Style (17th ed.) Citation
Thompson, L. F., C. G. Willson, and M. J. Bowden. Introduction to Microlithography. 2nd ed. Washington, DC: American Chemical Society, 1994.
MLA (9th ed.) Citation
Thompson, L. F., et al. Introduction to Microlithography. 2nd ed. American Chemical Society, 1994.
Warning: These citations may not always be 100% accurate.