Polymers for microelectronics resists and dielectrics /

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Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors:	Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi
Format:	Book
Language:	English
Published:	Washington, DC American Chemical Society 1994.
Series:	ACS symposium series, 0097-6156 ;
Subjects:	Microelectronics > Materials > Congresses. Polymers > Congresses.
Online Access:	View in OPAC
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Holdings details from Slovenská chemická knižnica (I)
Call Number:	schkA2005/98616
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