Polymers for microelectronics resists and dielectrics /
Saved in:
| Corporate Authors: | , |
|---|---|
| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Washington, DC
American Chemical Society
1994.
|
| Series: | ACS symposium series,
0097-6156 ; |
| Subjects: | |
| Online Access: | View in OPAC |
| Tags: |
No Tags, Be the first to tag this record!
|
Similar Items: Polymers for microelectronics
- Microelectronics technology : polymers for advanced imaging and packaging : developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995 /
- Microelectronics processing : inorganic materials characterization /
- Introduction to microlithography /
- Polymers for high technology : electronics and photonics /
- Microelectronics processing chemical engineering aspects /
- Cross-linked polymers chemistry, properties, and applications /