Polymers for microelectronics resists and dielectrics /
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| Körperschaften: | , |
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| Weitere Verfasser: | , , |
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Washington, DC
American Chemical Society
1994.
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| Schriftenreihe: | ACS symposium series,
0097-6156 ; |
| Schlagworte: | |
| Online-Zugang: | Im OPAC anzeigen |
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