Microelectronics processing chemical engineering aspects /

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Bibliographic Details
Other Authors:	Hess, Dennis W., Jensen, Klavs F., 1952-
Format:	Book
Language:	English
Published:	Washington, DC American Chemical Society 1989.
Series:	Advances in chemistry series 221
Subjects:	Microelectronics > Materials. Integrated circuits > Design and construction. Surface chemistry.
Online Access:	View in OPAC
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Holdings details from Slovenská chemická knižnica (I)
Call Number:	schkA2005/98454
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