Microelectronics processing chemical engineering aspects /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Washington, DC
American Chemical Society
1989.
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| Series: | Advances in chemistry series
221 |
| Subjects: | |
| Online Access: | View in OPAC |
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| Physical Description: | xiv, 547 p. ill. 24 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 0841214751 |
| ISSN: | 0065-2393 |