Microelectronics processing chemical engineering aspects /
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| Outros Autores: | , |
|---|---|
| Formato: | Livro |
| Idioma: | inglês |
| Publicado em: |
Washington, DC
American Chemical Society
1989.
|
| Colecção: | Advances in chemistry series
221 |
| Assuntos: | |
| Acesso em linha: | View in OPAC |
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MARC
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| 245 | 0 | 0 | |a Microelectronics processing |b chemical engineering aspects / |c Dennis W. Hess, editor, Klavs F. Jensen, editor. |
| 260 | |a Washington, DC |b American Chemical Society |c 1989. | ||
| 300 | |a xiv, 547 p. |b ill. |c 24 cm. | ||
| 440 | 0 | |a Advances in chemistry series |x 0065-2393 |v 221 | |
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Surface chemistry. | |
| 700 | 1 | |a Hess, Dennis W. | |
| 700 | 1 | |a Jensen, Klavs F., |d 1952- |9 569 | |
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