Polymers for microelectronics resists and dielectrics /
Saved in:
| Corporate Authors: | , |
|---|---|
| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Washington, DC
American Chemical Society
1994.
|
| Series: | ACS symposium series,
0097-6156 ; |
| Subjects: | |
| Online Access: | View in OPAC |
| Tags: |
No Tags, Be the first to tag this record!
|
MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 005 | 20260127134315.0 | ||
| 008 | 050517s1994 dcua b 001 0 eng | ||
| 010 | |a 93-033955 | ||
| 020 | |a 0841227217 (alk. paper) | ||
| 035 | |a vtls008154498 | ||
| 035 | |a 1107870 | ||
| 039 | 9 | |a 202006042034 |b AUTHORITY |c 200505171315 |d mschk03 |y 200505171314 |z mschk03 | |
| 040 | |a STUSCHK1 |b slo |c STUSCHK1 | ||
| 082 | 0 | 0 | |a 621.3815/31 |2 20 |
| 245 | 0 | 0 | |a Polymers for microelectronics |b resists and dielectrics / |c Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor. |
| 260 | |a Washington, DC |b American Chemical Society |c 1994. | ||
| 300 | |a xii, 571 p. |b ill. |c 24 cm. | ||
| 440 | 0 | |a ACS symposium series, |v 0097-6156 ; |x 537 | |
| 500 | |a "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992." | ||
| 504 | |a Includes bibliographical references and indexes. | ||
| 650 | 0 | |a Microelectronics |x Materials |x Congresses. | |
| 650 | 0 | |a Polymers |x Congresses. | |
| 700 | 1 | |a Thompson, L. F., |d 1944- | |
| 700 | 1 | |a Willson, C. G. |q (C. Grant), |d 1939- | |
| 700 | 1 | |a Tagawa, Seiichi. | |
| 710 | 2 | |a American Chemical Society. |b Division of Polymeric Materials: Science and Engineering | |
| 710 | 2 | |a American Chemical Society. |b Meeting |n (203. : |d 1992 : |c San Francisco, Calif.) | |
| 906 | |a 7 |b cbc |c orignew |d 1 |e ocip |f 19 |g y-gencatlg | ||
| 910 | |a SCHK95 | ||
| 919 | |a 0-8412-2721-7 | ||
| 920 | |a ** LC HAS REQ'D # OF SHELF COPIES ** | ||
| 991 | |b c-GenColl |h TK7871.15.P6 |i P628 1994 |p 00054258549 |t Copy 1 |w BOOKS | ||
| 999 | |c 9361 |d 9361 | ||