Polymers for microelectronics resists and dielectrics /

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Corporate Authors: American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi
Format: Book
Language:English
Published: Washington, DC American Chemical Society 1994.
Series:ACS symposium series, 0097-6156 ;
Subjects:
Microelectronics > Materials > Congresses.
Polymers > Congresses.
Online Access:View in OPAC
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Item Description:"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Physical Description:xii, 571 p. ill. 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0841227217 (alk. paper)
ISSN:537

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