Polymers for microelectronics resists and dielectrics /
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| Enti autori: | , |
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| Altri autori: | , , |
| Natura: | Libro |
| Lingua: | inglese |
| Pubblicazione: |
Washington, DC
American Chemical Society
1994.
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| Serie: | ACS symposium series,
0097-6156 ; |
| Soggetti: | |
| Accesso online: | Visualizza in OPAC |
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