Polymers for microelectronics resists and dielectrics /
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| Corporate Authors: | , |
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| Outros Autores: | , , |
| Formato: | Livro |
| Idioma: | inglês |
| Publicado em: |
Washington, DC
American Chemical Society
1994.
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| Colecção: | ACS symposium series,
0097-6156 ; |
| Assuntos: | |
| Acesso em linha: | View in OPAC |
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