Microelectronics processing : inorganic materials characterization /
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| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Washington, DC
American Chemical Society
1986.
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| Series: | ACS symposium series
295 |
| Subjects: | |
| Online Access: | View in OPAC |
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| Physical Description: | x, 443 p. ill. 24 cm. |
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| Bibliography: | Includes bibliographies and indexes. |
| ISBN: | 0841209340 |
| ISSN: | 0097-6156 ; |