Microelectronics processing : inorganic materials characterization /
Guardado en:
| Autor Corporativo: | |
|---|---|
| Otros Autores: | |
| Formato: | Libro |
| Lenguaje: | inglés |
| Publicado: |
Washington, DC
American Chemical Society
1986.
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| Colección: | ACS symposium series
295 |
| Materias: | |
| Acceso en línea: | Ver en el OPAC |
| Etiquetas: |
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MARC
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| 245 | 0 | 0 | |a Microelectronics processing : |b inorganic materials characterization / |c Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. |
| 260 | |a Washington, DC |b American Chemical Society |c 1986. | ||
| 300 | |a x, 443 p. |b ill. |c 24 cm. | ||
| 440 | 0 | |a ACS symposium series |x 0097-6156 ; |v 295 | |
| 504 | |a Includes bibliographies and indexes. | ||
| 650 | 0 | |a Microelectronics |x Materials |x Congresses. | |
| 700 | 1 | |a Casper, L. A. | |
| 710 | 2 | |a American Chemical Society. |b Division of Industrial and Engineering Chemistry | |
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