Merač teploty v HF CVD reaktore s bezdrôtovým (optickým) prenosom informácie o teplote
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| Main Author: | |
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| Other Authors: | , |
| Format: | Manuscript Book |
| Language: | Slovak |
| Published: |
Bratislava :
STU v Bratislave FEI,
2007
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| 041 | 0 | |a slo | |
| 100 | 1 | |a Kolmačka, Michal, |d 1984- |4 aut |X 11771 |7 A000011771 | |
| 242 | 0 | 0 | |a Optoelectronic Thermometer for HF CVD Reactor |y eng |
| 245 | 1 | |a Merač teploty v HF CVD reaktore s bezdrôtovým (optickým) prenosom informácie o teplote | |
| 260 | |a Bratislava : |b STU v Bratislave FEI, |c 2007 | ||
| 300 | |a 44 s |c príl.3 s. | ||
| 650 | 7 | |a Mikroelektronika |2 stusub | |
| 650 | 7 | |a elektronika |2 stusub | |
| 650 | 7 | |a reaktory |2 stusub | |
| 650 | 7 | |a meranie teploty |2 stusub | |
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| 700 | 1 | |a Kremničan, V. |4 ths | |