Ionnoje legirovanije poluprovodniky = Ion implantation in semiconductors

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Detalhes bibliográficos
Main Authors:	Mayer, James W (Author), Eriksson, L. (Author), Davis, J.A (Author)
Formato:	Livro
Idioma:	russo
Publicado em:	Moskva : Mir, 1973
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MARC


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