Ion implantation range in semiconductors
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Academic Press,
1970
|
| Tags: |
No Tags, Be the first to tag this record!
|
MARC
| LEADER | 00000nam a22000003a 4500 | ||
|---|---|---|---|
| 001 | stu204277 | ||
| 005 | 20150617230053.7 | ||
| 008 | 100526s1977----xxu-----------------eng-d | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu | ||
| 080 | |a 621.382 | ||
| 080 | |a 537.572 | ||
| 100 | 1 | |a Mayer, James W |4 aut | |
| 245 | 1 | |a Ion implantation range in semiconductors | |
| 260 | |a New York : |b Academic Press, |c 1970 | ||
| 300 | |a 13, 280 s | ||
| 700 | 1 | |a Eriksson, L. |4 aut | |
| 700 | 1 | |a Davies, J.A. |4 aut | |
| 996 | |b E28456 |c E*28456 |l EE11 |s P |a 0 |w stu204277_0001 | ||