Dielektričeskije plenki v mikroelektronike
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | Russian |
| Published: |
Moskva :
Energija,
1977
|
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MARC
| LEADER | 00000nam a22000003a 4500 | ||
|---|---|---|---|
| 001 | stu216180 | ||
| 005 | 20150617225759.5 | ||
| 008 | 101111s1987----xxr-----------------rus-d | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | |a rus | |
| 044 | |a xxr | ||
| 080 | |a 621.315.6 | ||
| 080 | |a 621.382 | ||
| 100 | 1 | |a Korzo, Viktor F. |4 aut | |
| 245 | 1 | |a Dielektričeskije plenki v mikroelektronike | |
| 260 | |a Moskva : |b Energija, |c 1977 | ||
| 300 | |a 366 s | ||
| 700 | 1 | |a Čerňajev, Vladimir N. |4 aut | |
| 996 | |b E40206 |c E*40206 |l EE05 |s P |a 0 |w stu216180_0001 | ||