Ion Implantation, sputtering and their applications
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| Auteurs principaux: | , , |
|---|---|
| Format: | Livre |
| Langue: | anglais |
| Publié: |
London :
Academic Press,
1976
|
| Tags: |
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MARC
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|---|---|---|---|
| 001 | stu223331 | ||
| 005 | 20150617230120.0 | ||
| 008 | 110331s1976----uk------------------eng-d | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | |a eng | |
| 044 | |a uk | ||
| 080 | |a 537.57 | ||
| 100 | 1 | |a Townsend, P.D. |4 aut | |
| 245 | 1 | |a Ion Implantation, sputtering and their applications | |
| 260 | |a London : |b Academic Press, |c 1976 | ||
| 300 | |a 9, 333 s | ||
| 700 | 1 | |a Kelly, J.C. |4 aut | |
| 700 | 1 | |a Hartley, N.E.W |4 aut | |
| 996 | |b E37382 |c E*37382 |l EE11 |s P |a 0 |w stu223331_0001 | ||