Process Engineering Analysis in Semiconductor Device Fabrication /
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill,
1993
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MARC
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| 005 | 20150617225743.0 | ||
| 008 | 961121s1993----xxu-----------------eng-d | ||
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| 040 | |a STU |b slo | ||
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| 100 | 1 | |a Middleman, Stanley |4 aut | |
| 245 | 1 | |a Process Engineering Analysis in Semiconductor Device Fabrication / |c [aut.]Middleman,Stanley, Hochberg,Arthur K | |
| 260 | |a New York : |b McGraw-Hill, |c 1993 | ||
| 300 | |a 774 s.Tab.,grafy,lit.,index | ||
| 700 | 1 | |a Hochberg, Arthur K |4 aut | |
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