Laser microfabrication. Thin film processes and lithography /
Guardado en:
| Otros Autores: | |
|---|---|
| Formato: | Libro |
| Lenguaje: | inglés |
| Publicado: |
Boston :
Academic Press,
1989
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| Etiquetas: |
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MARC
| LEADER | 00000nam a22000003a 4500 | ||
|---|---|---|---|
| 001 | stu3667 | ||
| 005 | 20150617225813.3 | ||
| 008 | 930423s1989----xxu-----------------eng-d | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu | ||
| 080 | |a 538.97 |7 stu_us_auth*stu8133 | ||
| 080 | |a 539.23 | ||
| 080 | |a 621.793/.795 | ||
| 080 | |a 621.375.826 |7 stu_us_auth*stu9916 | ||
| 100 | 1 | |a Erlich, D.J. and o |4 com | |
| 245 | 1 | |a Laser microfabrication. Thin film processes and lithography / |c Edit.: Erlich,D.J. and o | |
| 260 | |a Boston : |b Academic Press, |c 1989 | ||
| 300 | |a 587 s | ||
| 996 | |b E68961 |c E*68961 |l EE11 |s P |a 0 |w stu3667_0001 | ||