Journal of vacuum science and technology. Part A. Vacuum, surfaces and films
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| Natura: | Periodico |
|---|---|
| Pubblicazione: |
1993
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| Tags: |
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MARC
| LEADER | 00000nas a22000003a 4500 | ||
|---|---|---|---|
| 001 | stu67160 | ||
| 005 | 20141121233611.0 | ||
| 008 | 011106s1993----------------------------d | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | ||
| 245 | |a Journal of vacuum science and technology. Part A. Vacuum, surfaces and films | ||
| 260 | |c 1993 | ||
| 500 | |a 1-6 | ||
| 500 | |a 6 | ||
| 500 | |a 1993 | ||
| 773 | 0 | |t Journal of vacuum science and technology. Part A. Vacuum, surfaces and films |w stu_us_cat*stu60042 |x 0734-2101 |7 nnas | |
| 996 | |d Vol. 11, 1993 |v Vol. 11 |y 1993 |l EE0103 |s A |a 24 |w stu67160_0001 | ||