Journal of Vacuum Science and Technology B
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| Format: | Serial |
|---|---|
| Published: |
1999
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MARC
| LEADER | 00000nas a22000003a 4500 | ||
|---|---|---|---|
| 001 | stu67184 | ||
| 005 | 20141121232741.6 | ||
| 008 | 011106s1999----------------------------d | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | ||
| 245 | |a Journal of Vacuum Science and Technology B | ||
| 260 | |c 1999 | ||
| 500 | |a 1-6 | ||
| 500 | |a 6 | ||
| 500 | |a 1999 | ||
| 773 | 0 | |t Journal of Vacuum Science and Technology B : |w stu_us_cat*stu60040 |x 1071-1023 |7 nnas | |
| 996 | |d Vol. 17, 1999 |v Vol. 17 |y 1999 |l EE0103 |s A |a 24 |w stu67184_0001 | ||