Analýza povlakov CrTiN vytvorených pri rôznych parametroch depozície

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Bibliographic Details
Main Author:	Žemličková, Marika (Author)
Other Authors:	Zacková, Paulína (Thesis advisor)
Format:	Manuscript Book
Language:	Slovak
Published:	2015
Subjects:	PVD predpätie na substráte hrúbka CrTiN povlak LARC CrTiN coating thickness bias voltage
Online Access:	http://is.stuba.sk/zp/portal_zp.pl?podrobnosti=105170
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