Transmission electron microscopy of silicon VLSI circuits and structures
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
John Wiley,
1983
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| 005 | 20190206124023.5 | ||
| 008 | 060719s1983----xxu-----------------eng-d | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu | ||
| 080 | |a 621.382.049.77 | ||
| 080 | |a 537.533.35 | ||
| 100 | 1 | |a Marcus, Robert B. |4 aut | |
| 245 | 1 | |a Transmission electron microscopy of silicon VLSI circuits and structures | |
| 260 | |a New York : |b John Wiley, |c 1983 | ||
| 300 | |a 10,217 s | ||
| 700 | 1 | |a Sheng, Tan Tsu |4 aut | |
| 996 | |b E57004 |c E*57004 |l EE11 |s P |a 0 |w stu123601_0001 | ||