Silicon micromachining /
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| Autori principali: | , |
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| Natura: | Libro |
| Lingua: | inglese |
| Pubblicazione: |
Cambridge :
Cambridge University Press,
1998
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| Soggetti: | |
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| 100 | 1 | |a Jansen, Henri V. |4 aut | |
| 245 | 1 | |a Silicon micromachining / |c M. Elwenspoek and H.V. Jansen | |
| 260 | |a Cambridge : |b Cambridge University Press, |c 1998 | ||
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