Dopovacie procesy v CVD epitaxii kremíka : Kand.diz.práca : V.odb. 11-22-9 : Obh. 28.11.1994 /

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Bibliographic Details
Main Author: Halaj, Ján (Author)
Other Authors: Barta, Štefan (Thesis advisor)
Format: Manuscript Book
Published: Bratislava : STU v Bratislave FEI, 1994
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Description
Physical Description:105 s Autoref.1994, 20 s