Skúmanie elektricky aktívnych porúch v MOS štruktúrach na báze čierneho kremíka
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| Autore principale: | |
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| Altri autori: | |
| Natura: | Manoscritto Libro |
| Lingua: | slovacco |
| Pubblicazione: |
2019
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| Soggetti: | |
| Accesso online: | http://is.stuba.sk/zp/portal_zp.pl?podrobnosti=144607 |
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| 242 | 0 | 1 | |a Investigation of the Electrically Active Defects in the MOS Structure Based on Black Silicon |y eng |
| 245 | 1 | 0 | |a Skúmanie elektricky aktívnych porúch v MOS štruktúrach na báze čierneho kremíka |
| 260 | |c 2019 | ||
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| 650 | 4 | |a DLTFS |2 slo | |
| 650 | 4 | |a elektrochemické leptanie |2 slo | |
| 650 | 4 | |a DLTS |2 slo | |
| 650 | 4 | |a čierny kremík |2 slo | |
| 650 | 4 | |a chemické leptanie |2 slo | |
| 650 | 4 | |a DLTS |2 eng | |
| 650 | 4 | |a DLTFS |2 eng | |
| 650 | 4 | |a black silicon |2 eng | |
| 650 | 4 | |a chemical etching |2 eng | |
| 650 | 4 | |a electrochemical etching |2 eng | |
| 700 | 1 | |a Kósa, Arpád |u 033000 |k Z8 |4 ths |U FEI Fakulta elektrotechniky a informatiky |T FEI Ústav elektroniky a fotoniky |X 50249 |U E030 |Y 549 |7 A000050249 | |
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