Microelectronic Materials and Processes
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Dordrecht :
Kluwer Academic Publishers,
1989
|
| Series: | Nato ASI Series
|
| Tags: |
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| LEADER | 00000nam a22000003a 4500 | ||
|---|---|---|---|
| 001 | stu25583 | ||
| 005 | 20150617225743.5 | ||
| 008 | 980518s1989------------------------eng-d | ||
| 020 | |a 0-7923-0154-4 | ||
| 040 | |a STU |b slo | ||
| 041 | 0 | |a eng | |
| 080 | |a 621.52 | ||
| 100 | 1 | |a Levy, R.A. |4 aut | |
| 245 | 1 | |a Microelectronic Materials and Processes | |
| 260 | |a Dordrecht : |b Kluwer Academic Publishers, |c 1989 | ||
| 300 | |a 985 s | ||
| 500 | |a Obr.,tab.,grafy,lit.,index | ||
| 830 | 0 | |a Nato ASI Series | |
| 996 | |b 284C009785 |c C*95347 |l CCI |s A |a 24 |w stu25583_0001 | ||