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Microsensors, MEMS, and smart devices

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Bibliographic Details
Main Authors: Gardner, Julian W. (Author), Varadan, Vijay K (Author), Awadelkarim, Osama O (Author)
Format: Book
Language:English
Published: Chichester : John Wiley & Sons, 2001
Subjects:
Mikroelektronika
fyzika polovodičov
polovodičové materiály
mikromechanika
MEMS
mikrosenzory
mikrostereolitografia
fyzika tuhých látok
mikromechanické zariadenia
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