Plasma deposition, treatment, and etching of polymers /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston
Academic Press
c1990.
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| Series: | Plasma--materials interactions
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| Subjects: | |
| Online Access: | Publisher description Table of contents View in OPAC |
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| Physical Description: | xiii, 528 p. ill. 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0122004302 (acidfree paper) |