Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Author:	Lieberman, M. A. (Michael A.)
Other Authors:	Lichtenberg, Allan J.
Format:	Book
Language:	English
Published:	Hoboken, N.J. Wiley-Interscience 2005.
Edition:	2nd ed.
Subjects:	Plasma dynamics. Thin films > Surfaces. Plasma etching. Plasma chemistry > Industrial applications.
Online Access:	Contributor biographical information Publisher description Table of contents only View in OPAC
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Call Number:	schkA2011/100185
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