Process engineering analysis in semiconductor device fabrication /

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Main Authors: Middleman, Stanley (Author), Hochberg, Arthur K (Author)
Format: Book
Language:English
Published: New York : McGraw-Hill, 1993
Edition:1.vyd.
Subjects:
polovodiče
polovodičové materiály
fyzika tuhých látok
mikrolitografia
iónová implantácia
plazmové leptanie
iónové leptanie
Pokovovanie
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